Publicaciones en colaboración con investigadores/as de University of California, San Diego (14)

2022

  1. Experimental and theoretical determination of the role of ions in atomic layer annealing

    Journal of Materials Chemistry C, Vol. 10, Núm. 14, pp. 5707-5715

2020

  1. Deposition of High Thermal Conductivity AlN Heat Spreader Films

    2020 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2020