Low temperature thermal ALD of a SiNx interfacial diffusion barrier and interface passivation layer on SixGe1− x(001) and SixGe1− x(110)

1. Edmonds, M.
2. Sardashti, K.
3. Wolf, S.
4. Chagarov, E.
5. Clemons, M.
6. Kent, T.
7. Park, J.H.
8. Tang, K.
9. McIntyre, P.C.
10. Yoshida, N.
11. Dong, L.
12. Holmes, R.
13. Alvarez, D.
14. Kummel, A.C.