Experimental and theoretical determination of the role of ions in atomic layer annealing

1. Ueda, S.T.
2. McLeod, A.
3. Jo, Y.
4. Zhang, Z.
5. Spiegelman, J.
6. Spiegelman, J.
7. Alvarez, D.
8. Moser, D.
9. Kanjolia, R.
10. Moinpour, M.
11. Woodruff, J.
12. Cho, K.
13. Kummel, A.C.