Advantages of hydrogen peroxide as an oxidant for atomic layer deposition and related novel delivery system

  1. Spiegelman, J.
  2. Alvarez Jr., D.
  3. Holmes, R.J.
  4. Heinlein, E.
  5. Shamsi, Z.
Actas:
Materials Research Society Symposium Proceedings

ISSN: 0272-9172

ISBN: 9781605114712

Ano de publicación: 2013

Volume: 1494

Páxinas: 209-214

Tipo: Achega congreso

DOI: 10.1557/OPL.2013.582 GOOGLE SCHOLAR
Fonte de datos: Scopus