Advantages of hydrogen peroxide as an oxidant for atomic layer deposition and related novel delivery system

  1. Spiegelman, J.
  2. Alvarez Jr., D.
  3. Holmes, R.J.
  4. Heinlein, E.
  5. Shamsi, Z.
Actes de conférence:
Materials Research Society Symposium Proceedings

ISSN: 0272-9172

ISBN: 9781605114712

Année de publication: 2013

Volumen: 1494

Pages: 209-214

Type: Communication dans un congrès

DOI: 10.1557/OPL.2013.582 GOOGLE SCHOLAR
La source de données: Scopus