Advantages of hydrogen peroxide as an oxidant for atomic layer deposition and related novel delivery system

  1. Spiegelman, J.
  2. Alvarez Jr., D.
  3. Holmes, R.J.
  4. Heinlein, E.
  5. Shamsi, Z.
Aktak:
Materials Research Society Symposium Proceedings

ISSN: 0272-9172

ISBN: 9781605114712

Argitalpen urtea: 2013

Alea: 1494

Orrialdeak: 209-214

Mota: Biltzar ekarpena

DOI: 10.1557/OPL.2013.582 GOOGLE SCHOLAR