Advantages of hydrogen peroxide as an oxidant for atomic layer deposition and related novel delivery system

  1. Spiegelman, J.
  2. Alvarez Jr., D.
  3. Holmes, R.J.
  4. Heinlein, E.
  5. Shamsi, Z.
Proceedings:
Materials Research Society Symposium Proceedings

ISSN: 0272-9172

ISBN: 9781605114712

Year of publication: 2013

Volume: 1494

Pages: 209-214

Type: Conference paper

DOI: 10.1557/OPL.2013.582 GOOGLE SCHOLAR
Data source: Scopus