Química Orgánica e Inorgánica
Saila
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University of Texas at Dallas
Richardson, Estados UnidosUniversity of Texas at Dallas-ko ikertzaileekin lankidetzan egindako argitalpenak (4)
2022
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Experimental and theoretical determination of the role of ions in atomic layer annealing
Journal of Materials Chemistry C, Vol. 10, Núm. 14, pp. 5707-5715
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Robust low-temperature (350 °C) ferroelectric Hf0.5Zr0.5O2fabricated using anhydrous H2O2as the ALD oxidant
Applied Physics Letters, Vol. 121, Núm. 22
2020
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Low temperature thermal atomic layer deposition of aluminum nitride using hydrazine as the nitrogen source
Materials, Vol. 13, Núm. 15, pp. 1-10