Publicaciones en colaboración con investigadores/as de Stanford University (2)

2020

  1. Deposition of High Thermal Conductivity AlN Heat Spreader Films

    2020 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2020

2017

  1. Low temperature thermal ALD of a SiNx interfacial diffusion barrier and interface passivation layer on SixGe1− x(001) and SixGe1− x(110)

    Journal of Chemical Physics, Vol. 146, Núm. 5