Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties

  1. Pachlhofer, J.M.
  2. Martín-Luengo, A.T.
  3. Franz, R.
  4. Franzke, E.
  5. Köstenbauer, H.
  6. Winkler, J.
  7. Bonanni, A.
  8. Mitterer, C.
Revue:
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

ISSN: 1520-8559,  0734-2101

Année de publication: 2017

Volumen: 35

Número: 2

Type: Article

DOI: 10.1116/1.4973214 GOOGLE SCHOLAR

Objectifs de Développement Durable

La source de données: Scopus