Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties

  1. Pachlhofer, J.M.
  2. Martín-Luengo, A.T.
  3. Franz, R.
  4. Franzke, E.
  5. Köstenbauer, H.
  6. Winkler, J.
  7. Bonanni, A.
  8. Mitterer, C.
Journal:
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

ISSN: 1520-8559,  0734-2101

Year of publication: 2017

Volume: 35

Issue: 2

Type: Article

DOI: 10.1116/1.4973214 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus