Non-reactive dc magnetron sputter deposition of Mo-O thin films from ceramic MoOx targets
- Pachlhofer, J.M.
- Tarazaga Martín-Luengo, A.
- Franz, R.
- Franzke, E.
- Köstenbauer, H.
- Winkler, J.
- Bonanni, A.
- Mitterer, C.
Revue:
Surface and Coatings Technology
ISSN: 0257-8972
Année de publication: 2017
Volumen: 332
Pages: 80-85
Type: Article
