Non-reactive dc magnetron sputter deposition of Mo-O thin films from ceramic MoOx targets

  1. Pachlhofer, J.M.
  2. Tarazaga Martín-Luengo, A.
  3. Franz, R.
  4. Franzke, E.
  5. Köstenbauer, H.
  6. Winkler, J.
  7. Bonanni, A.
  8. Mitterer, C.
Journal:
Surface and Coatings Technology

ISSN: 0257-8972

Year of publication: 2017

Volume: 332

Pages: 80-85

Type: Article

DOI: 10.1016/J.SURFCOAT.2017.07.083 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus