The effect of glow discharge sputtering on the analysis of metal oxide films

  1. Malherbe, J.
  2. Martinez, H.
  3. Fernández, B.
  4. Pécheyran, C.
  5. Donard, O.F.X.
Journal:
Spectrochimica Acta - Part B Atomic Spectroscopy

ISSN: 0584-8547

Year of publication: 2009

Volume: 64

Issue: 2

Pages: 155-166

Type: Article

DOI: 10.1016/J.SAB.2008.11.009 GOOGLE SCHOLAR
Data source: Scopus