Direct chemical in-depth profile analysis and thickness quantification of nanometer multilayers using pulsed-rf-GD-TOFMS

  1. Valledor, R.
  2. Pisonero, J.
  3. Bordel, N.
  4. Martín, J.I.
  5. Quirós, C.
  6. Tempez, A.
  7. Sanz-Medel, A.
Journal:
Analytical and Bioanalytical Chemistry

ISSN: 1618-2642,  1618-2650

Year of publication: 2010

Volume: 396

Issue: 8

Pages: 2881-2887

Type: Article

DOI: 10.1007/S00216-009-3382-8 GOOGLE SCHOLAR
Data source: Scopus