Common-path two-wavelength interferometer with submicron precision for profile measurements in on-line applications

  1. Enguita, J.M.
  2. Fradec, M.
  3. Álvarez, I.
  4. Marina, J.
Journal:
Optical Engineering

ISSN: 0091-3286,  1560-2303

Year of publication: 2010

Volume: 49

Issue: 2

Type: Article

DOI: 10.1117/1.3321709 GOOGLE SCHOLAR
Data source: Scopus