Common-path two-wavelength interferometer with submicron precision for profile measurements in on-line applications

  1. Enguita, J.M.
  2. Fradec, M.
  3. Álvarez, I.
  4. Marina, J.
Revista:
Optical Engineering

ISSN: 0091-3286,  1560-2303

Ano de publicación: 2010

Volume: 49

Número: 2

Tipo: Artigo

DOI: 10.1117/1.3321709 GOOGLE SCHOLAR
Fonte de datos: Scopus