Common-path two-wavelength interferometer with sub-micron precision for profile measurements in on-line applications

  1. Enguita, J.M.
  2. Álvarez, I.
  3. Frade, M.
  4. Marina, J.
Proceedings:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 0277-786X

ISBN: 9780819476722

Year of publication: 2009

Volume: 7389

Type: Conference paper

DOI: 10.1117/12.827502 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus