Common-path two-wavelength interferometer with sub-micron precision for profile measurements in on-line applications
- Enguita, J.M.
- Álvarez, I.
- Frade, M.
- Marina, J.
ISSN: 0277-786X
ISBN: 9780819476722
Ano de publicación: 2009
Volume: 7389
Tipo: Achega congreso