Common-path two-wavelength interferometer with sub-micron precision for profile measurements in on-line applications

  1. Enguita, J.M.
  2. Álvarez, I.
  3. Frade, M.
  4. Marina, J.
Actas:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 0277-786X

ISBN: 9780819476722

Ano de publicación: 2009

Volume: 7389

Tipo: Achega congreso

DOI: 10.1117/12.827502 GOOGLE SCHOLAR

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