Conoscopic holography based profilometers for defect inspection: Improvements in speed, resolution and noise reduction

  1. Álvarez, I.
  2. Enguita, J.M.
  3. Marina, C.F.J.
  4. Fernández, Y.
Proceedings:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 0277-786X

ISBN: 9780819462459

Year of publication: 2006

Volume: 6189

Type: Conference paper

DOI: 10.1117/12.661455 GOOGLE SCHOLAR
Data source: Scopus