Conoscopic holography based profilometers for defect inspection: Improvements in speed, resolution and noise reduction

  1. Álvarez, I.
  2. Enguita, J.M.
  3. Marina, C.F.J.
  4. Fernández, Y.
Actes:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 0277-786X

ISBN: 9780819462459

Any de publicació: 2006

Volum: 6189

Tipus: Aportació congrés

DOI: 10.1117/12.661455 GOOGLE SCHOLAR