Conference papers (2) Publications in which a researcher has participated

2020

  1. Deposition of High Thermal Conductivity AlN Heat Spreader Films

    2020 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2020

  2. Sacrificial hardmask ALD with hydrogen peroxide: Comparative study of low temperature growth and film characteristics for TiO2 and Al2O3

    Proceedings of SPIE - The International Society for Optical Engineering