Department
Química Orgánica e Inorgánica
Conference papers (2) Publications in which a researcher has participated
2020
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Deposition of High Thermal Conductivity AlN Heat Spreader Films
2020 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2020
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Sacrificial hardmask ALD with hydrogen peroxide: Comparative study of low temperature growth and film characteristics for TiO2 and Al2O3
Proceedings of SPIE - The International Society for Optical Engineering