Departamento
Química Orgánica e Inorgánica
Aportaciones congreso (3) Publicaciones en las que ha participado algún/a investigador/a
2020
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Deposition of High Thermal Conductivity AlN Heat Spreader Films
2020 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2020
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Sacrificial hardmask ALD with hydrogen peroxide: Comparative study of low temperature growth and film characteristics for TiO2 and Al2O3
Proceedings of SPIE - The International Society for Optical Engineering
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Silicon/Biogas-Derived Carbon Nanofibers Composites for Anodes of Lithium-Ion Batteries
C-JOURNAL OF CARBON RESEARCH