New vaporization sources for H2O2 for pre-treatment/cleaning of ALD deposition surfaces
- Alvarez, D.
- Heinlein, E.
- Holmes, R.J.
- Arya, B.
- Shon-Roy, L.
- Spiegelman, J.
ISSN: 1078-8743
ISBN: 9781467350068
Année de publication: 2013
Pages: 159-162
Type: Communication dans un congrès