Two-Step Resist Deposition of E-Beam Patterned Thick Py Nanostructures for X-ray Microscopy
- Hermosa, J.
- Hierro-Rodríguez, A.
- Quirós, C.
- Vélez, M.
- Sorrentino, A.
- Aballe, L.
- Pereiro, E.
- Ferrer, S.
- Martín, J.I.
Revue:
Micromachines
ISSN: 2072-666X
Année de publication: 2022
Volumen: 13
Número: 2
Type: Article
