Characterization of carbon nitride thin films prepared by dual ion beam sputtering

  1. Fernández, A.
  2. Prieto, P.
  3. Quirós, C.
  4. Sanz, J.M.
  5. Martin, J.-M.
  6. Vacher, B.
Journal:
Applied Physics Letters

ISSN: 0003-6951

Year of publication: 1996

Volume: 69

Issue: 6

Pages: 764-766

Type: Article

DOI: 10.1063/1.117884 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus