Quantitative chemical depth profiles of ZrN/BN multilayers

  1. Sanz, J.M.
  2. Prieto, P.
  3. Quiros, C.
  4. Elizalde, E.
  5. Fernandez, A.
  6. Perez-Casero, R.
Journal:
Surface and Interface Analysis

ISSN: 0142-2421

Year of publication: 1998

Volume: 26

Issue: 11

Pages: 806-814

Type: Article

DOI: 10.1002/(SICI)1096-9918(199810)26:11<806::AID-SIA426>3.0.CO;2-2 GOOGLE SCHOLAR
Data source: Scopus