Determination of resputtering yields in carbon nitride films grown by dual ion beam sputtering

  1. Quirós, C.
  2. Prieto, P.
  3. Elizalde, E.
  4. Pérez-Casero, R.
  5. Gómez, V.
  6. Herrero, P.
  7. Sanz, J.M.
Aldizkaria:
Surface and Coatings Technology

ISSN: 0257-8972

Argitalpen urtea: 2000

Alea: 125

Zenbakia: 1-3

Orrialdeak: 366-370

Mota: Artikulua

DOI: 10.1016/S0257-8972(99)00618-0 GOOGLE SCHOLAR
Datuen iturria: Scopus