Determination of resputtering yields in carbon nitride films grown by dual ion beam sputtering
- Quirós, C.
- Prieto, P.
- Elizalde, E.
- Pérez-Casero, R.
- Gómez, V.
- Herrero, P.
- Sanz, J.M.
ISSN: 0257-8972
Year of publication: 2000
Volume: 125
Issue: 1-3
Pages: 366-370
Type: Article