Low-temperature amorphous boron nitride on Si 0.7 Ge 0.3 (001), Cu, and HOPG from sequential exposures of N 2 H 4 and BCl 3

  1. Wolf, S.
  2. Edmonds, M.
  3. Sardashti, K.
  4. Clemons, M.
  5. Park, J.H.
  6. Yoshida, N.
  7. Dong, L.
  8. Nemani, S.
  9. Yieh, E.
  10. Holmes, R.
  11. Alvarez, D.
  12. Kummel, A.C.
Journal:
Applied Surface Science

ISSN: 0169-4332

Year of publication: 2018

Volume: 439

Pages: 689-696

Type: Article

DOI: 10.1016/J.APSUSC.2018.01.038 GOOGLE SCHOLAR