Low-temperature amorphous boron nitride on Si 0.7 Ge 0.3 (001), Cu, and HOPG from sequential exposures of N 2 H 4 and BCl 3
- Wolf, S.
- Edmonds, M.
- Sardashti, K.
- Clemons, M.
- Park, J.H.
- Yoshida, N.
- Dong, L.
- Nemani, S.
- Yieh, E.
- Holmes, R.
- Alvarez, D.
- Kummel, A.C.
Journal:
Applied Surface Science
ISSN: 0169-4332
Year of publication: 2018
Volume: 439
Pages: 689-696
Type: Article