Depth profiling with modified dc-Grimm and rf-Grimm-type glow discharges operated with high gas flow rates and coupled to a high-resolution mass spectrometer
- Pisonero, J.
- Feldmann, I.
- Bordel, N.
- Sanz-Medel, A.
- Jakubowski, N.
ISSN: 1618-2642
Year of publication: 2005
Volume: 382
Issue: 8
Pages: 1965-1974
Type: Article