Carbon nitride films synthesized by dual ion beam sputtering

  1. Prieto, P.
  2. Quirós, C.
  3. Elizalde, E.
  4. Fernandez, A.
  5. Martin, J.M.
  6. Sanz, J.M.
Journal:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Year of publication: 1997

Volume: 122

Issue: 3

Pages: 534-537

Type: Article

DOI: 10.1016/S0168-583X(96)00566-6 GOOGLE SCHOLAR
Data source: Scopus