Electron inelastic mean free path and dielectric properties of a -boron, a -carbon, and their nitrides as determined by quantitative analysis of reflection electron energy loss spectroscopy

  1. Prieto, P.
  2. Quirós, C.
  3. Elizalde, E.
  4. Sanz, J.M.
Revista:
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

ISSN: 0734-2101

Año de publicación: 2006

Volumen: 24

Número: 3

Páginas: 396-407

Tipo: Artículo

DOI: 10.1116/1.2183249 GOOGLE SCHOLAR