Radiofrequency glow discharge time of flight mass spectrometry for thin films analysis: Pulsed mode versus continuous mode

  1. Bordel, N.
  2. Lobo, L.
  3. Pisonero, J.
  4. Pereiro, R.
  5. Tuccitto, N.
  6. Licciardello, A.
  7. Tempez, A.
  8. Chapon, P.
  9. Hohl, M.
  10. Michler, J.
  11. Sanz-Medel, A.
Journal:
Yejin Fenxi/Metallurgical Analysis

ISSN: 1000-7571

Year of publication: 2009

Volume: 29

Issue: 11

Pages: 1-7

Type: Article