Effect of operation parameters on the sputtering and emission processes in radiofrequency glow discharge. A comparison with the direct-current mode

  1. Perez, Covadonga
  2. Pereiro, Rosario
  3. Bordel, Nerea
  4. Sanz-Medel, Alfredo
Journal:
Spectrochimica acta, Part B: Atomic spectroscopy

ISSN: 0584-8547

Year of publication: 1998

Volume: 53

Issue: 11

Pages: 1541-1551

Type: Article

DOI: 10.1016/S0584-8547(98)00185-2 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus