Preliminary study of the role of discharge conditions on the in-depth analysis of conducting thin films by radiofrequency glow discharge optical emission spectrometry

1. Bordel-García, N.
2. Pereiro-García, R.
3. Fernández-Garcîa, M.
4. Sanz-Medel, A.
5. Harville, T.R.
6. Marcus, R.K.