GRUPO TEÓRICO-EXPERIMENTAL DE QUÍMICA ORGANOMETÁLICA
TEQO
Stanford University
Stanford, Estados UnidosPublications in collaboration with researchers from Stanford University (2)
2020
-
Deposition of High Thermal Conductivity AlN Heat Spreader Films
2020 International Symposium on VLSI Technology, Systems and Applications, VLSI-TSA 2020
2017
-
Low temperature thermal ALD of a SiNx interfacial diffusion barrier and interface passivation layer on SixGe1− x(001) and SixGe1− x(110)
Journal of Chemical Physics, Vol. 146, Núm. 5