Endogenous and exogenous hydrogen influence on amorphous silicon thin films analysis by pulsed radiofrequency glow discharge optical emission spectrometry

  1. Sánchez, P.
  2. Alberts, D.
  3. Fernández, B.
  4. Menéndez, A.
  5. Pereiro, R.
  6. Sanz-Medel, A.
Journal:
Analytica Chimica Acta

ISSN: 0003-2670,  1873-4324

Year of publication: 2012

Volume: 714

Pages: 1-7

Type: Article

DOI: 10.1016/J.ACA.2011.11.052 GOOGLE SCHOLAR
Data source: Scopus