On-line submicron profile measurements from safe distances with conoscopic holography: Feasibility and potential problems

  1. Álvarez, I.
  2. Enguita, J.M.
  3. Marina, J.
  4. Fraga, C.
Revista:
Optical Engineering

ISSN: 1560-2303 0091-3286

Any de publicació: 2008

Volum: 47

Número: 2

Tipus: Article

DOI: 10.1117/1.2844713 GOOGLE SCHOLAR